@book{
international1989iaea,
title={Analytical Chemistry in Semiconductor Manufacturing: Techniques, Role of Nuclear Methods and Need for Quality Control (Report of a Consultants Meeting, Gaithersburg, Maryland, USA, 2-3 October 1987)},
series={TECDOC Series},
number={512},
year={1989},
url={http://www.dgdingfa.net/publications/767/analytical-chemistry-in-semiconductor-manufacturing-techniques-role-of-nuclear-methods-and-need-for-quality-control-report-of-a-consultants-meeting-gaithersburg-maryland-usa-2-3-october-1987},
publisher={INTERNATIONAL ATOMIC ENERGY AGENCY},
address={Vienna}
}