@book{
international2004iaea,
title={Ion Beam Techniques for the Analysis of Light Elements in Thin Films, Including Depth Profiling},
series={TECDOC Series},
number={1409},
year={2004},
isbn={92-0-110404-9},
url={http://www.dgdingfa.net/publications/7037/ion-beam-techniques-for-the-analysis-of-light-elements-in-thin-films-including-depth-profiling},
publisher={INTERNATIONAL ATOMIC ENERGY AGENCY},
address={Vienna}
}