@book{
international2002iaea,
title={Development and Characterization of Semiconductor Materials by Ion Beams},
series={TECDOC Series},
number={1292},
year={2002},
url={http://www.dgdingfa.net/publications/6431/development-and-characterization-of-semiconductor-materials-by-ion-beams},
publisher={INTERNATIONAL ATOMIC ENERGY AGENCY},
address={Vienna}
}